Patent · US Expired

Field emission device and method for manufacturing same

US5911614A · kind A · utility

3Cited by
4References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 7, 1997
Grant dateJun 15, 1999
Priority date
Expiry dateApr 7, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2329/92
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A field emission device capable of facilitating manufacturing thereof. A cathode substrate is formed on the same plane thereof with gate terminals and cathode electrode each having an end acting as a cathode terminal, on which an insulating layer is arranged. The insulating layer is formed thereon with gate lines 8, which are connected to the gate terminals through a conductive film deposited in contact holes formed during formation of the gate electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.