Test fixture and method of testing a spin rinse dryer and components thereof
US5911785A · kind A · utility
3Cited by
5References
16Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 17, 1997 |
| Grant date | Jun 15, 1999 |
| Priority date | — |
| Expiry date | Dec 17, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A test fixture and method emulate the inputs and/or outputs to a controller and motor of a spin rinse dryer to permit selective testing of the controller and/or motor thereof. In some instances, the test fixture enables testing of a spin rinse dryer controller and/or motor to be performed outside of a clean room environment, and without requiring a spin rinse dryer to be taken off-line. In other instances, the same test fixture enables diagnosis of which component if any has failed in a production spin rinse dryer so that the failed component can be replaced quickly to minimize the downtime of the equipment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.