Borosilicate electronic coatings
US5912047A · kind A · utility
2Cited by
10References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1993 |
| Grant date | Jun 15, 1999 |
| Priority date | — |
| Expiry date | Mar 25, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/28
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A borosilicate containing coating is formed on an electronic substrate by applying a borosilazane polymer on the substrate and converting it to borosilicate by heating in an oxidizing environment. The resultant thick planarizing coatings are useful as protective coatings and dielectric inner layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.