Infrared detector and manufacturing process
US5912464A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 1, 1997 |
| Grant date | Jun 15, 1999 |
| Priority date | — |
| Expiry date | Aug 1, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/193
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared detector includes a sensitive part having a sensitive element and conducting elements. The sensitive element includes a layer of material in which the resistivity varies with the temperature. The conducting elements perform the functions of electrodes for the detector and infrared absorber. At least one support element for the sensitive part is capable of positioning the sensitive part, electrically connecting the sensitive part to a readout circuit, and thermally insulating the sensitive part from the rest of the structure. All conducting elements are places on the same surface of the layer of temperature sensitive material. The detector is manufactured according to a forming and etching process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.