Measurement of the curvature of a surface using parallel light beams
US5912738A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 25, 1996 |
| Grant date | Jun 15, 1999 |
| Priority date | — |
| Expiry date | Nov 25, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/255
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus for measuring curvature of a surface wherein a beam of collimated light is passed through means for producing a plurality of parallel light beams each separated by a common distance which then reflect off the surface to fall upon a detector that measures the separation of the reflected beams of light. This means can be an etalon and the combination of a diffractive element and a converging lens. The curvature of the surface along the line onto which the multiple beams fall can be calculated from this information. A two-dimensional map of the curvature can be obtained by adding a second etalon (or a second combination of a diffractive element and a converging lens) which is rotated 90.degree. about the optical axis relative to the first etalon and inclined at the same angle. The second etalon creates an individual set of parallel light beams from each of the individual beams created by the first etalon with the sets of parallel light beams from the second etalon rotated 90.degree. relative to the line onto which the single set of parallel beams from the first etalon would have fallen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.