Patent · US Expired

Conveying apparatus

US5913652A · kind A · utility

16Cited by
9References
5Claims
0Family size

Inventor

Key dates

Filing dateSep 24, 1997
Grant dateJun 22, 1999
Priority date
Expiry dateSep 24, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S414/139
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

The invention relates to a turntable 12, which is driven at a constant timing frequency, which depends on the duration of the longest working time at a process station. The substrate 2 can be delivered by means of the pivoted substrate gripper 13 to one or several process stations or satellite process stations 4 and/or an outlet station 3 or a depositing station 29 or 14 provided outside of the turntable 12.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.