Patent · US Expired

Method of providing a smooth surface on a substrate

US5913716A · kind A · utility

61Cited by
105References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 13, 1997
Grant dateJun 22, 1999
Priority date
Expiry dateMay 13, 2017

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB24B35/00
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A process for polishing a workpiece. The process comprises the steps of: PA1 (a) placing a structured abrasive article bearing precisely shaped abrasive composites on at least one major surface thereof in contact with a surface of a workpiece having a surface having a scratch pattern having an initial Ra value thereon such that said composite bearing surface is in contact with said workpiece surface; PA1 (b) moving at least one of said workpiece or said structured abrasive article relative to the other in a first abrading direction, while simultaneously moving at least one of said workpiece or said structured abrasive article relative to the other in a second abrading direction not parallel to said first abrading direction such that said second abrading direction crosses said first abrading direction while contact is maintained between said composite bearing surface and said workpiece surface, whereby said initial Ra value is reduced. Typically, the surface of the workpiece is characterized by a scratch pattern having an initial Ra preferably less than about 120 micrometers, more preferably less than about 90 micrometers, most preferably less than about 20 micrometers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.