Process and installation for delivering ultra-pure helium
US5916247A · kind A · utility
7Cited by
13References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 11, 1997 |
| Grant date | Jun 29, 1999 |
| Priority date | — |
| Expiry date | Apr 11, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S62/908
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
In order to deliver ultrapure helium to a utilization line (1), helium is withdrawn, in liquid or supercritical form, from a storage tank (3), it is filtered in this liquid or supercritical form (at 4), the filtered helium is vaporized and the resulting helium gas is sent to the utilization line (1). The process is applicable to the cooling of integrated-circuit wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.