Method and apparatus for temperature controlled spin-coating systems
US5916368A · kind A · utility
11Cited by
13References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 27, 1997 |
| Grant date | Jun 29, 1999 |
| Priority date | — |
| Expiry date | Feb 27, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/11
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed is method and apparatus for distributing a chemical over the surface of a substrate. The method includes depositing the chemical on a portion of the surface of a substrate near the center of the substrate. The method further includes controlling the temperature of the surface of a substrate so that the viscosity of the chemical is calibrated to cause the chemical to be deposited on the surface of the substrate in a substantially uniform manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.