Active matrix substrate having benzocyclobutene-containing interlayer insulating film and method for fabricating same
US5917571A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 29, 1997 |
| Grant date | Jun 29, 1999 |
| Priority date | — |
| Expiry date | May 29, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/136227
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An active matrix substrate of the present invention includes: an insulating substrate; scanning bus lines and signal bus lines provided on the insulating substrate so as to cross each other; switching elements provided in the vicinity of crossing portions of the scanning bus lines and the signal bus lines. The active matrix substrate also includes an interlayer insulating film covering the switching elements, the scanning bus lines and the signal bus lines; and pixel electrodes provided on the surface of the interlayer insulating film opposite to the insulating substrate, each of the pixel electrodes being electrically connected with each of the switching elements via a contact hole penetrating the interlayer insulating film. The interlayer insulating film includes a first layer containing benzocyclobutene and a second layer containing silicon dioxide obtained by treating the surface of the first layer with oxygen plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.