Automated visual inspection apparatus for detecting defects and for measuring defect size
US5917934A · kind A · utility
18Cited by
4References
6Claims
0Family size
Assignees
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Key dates
| Filing date | Mar 15, 1996 |
| Grant date | Jun 29, 1999 |
| Priority date | — |
| Expiry date | Mar 15, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30121
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Apparatus for detecting etch defects in an object having a plurality of openings by generating an image signal of the object representing light intensity values of a plurality of pixels, processing the image signal to form data signals representing light intensity values of groups of pixels, filtering the data signals to remove signals representing the ends of the openings, and pairing two data signals when the groups of pixels represented thereby represent an etch defect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.