Method and apparatus for measuring volume
US5918648A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 21, 1997 |
| Grant date | Jul 6, 1999 |
| Priority date | — |
| Expiry date | Feb 21, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A dispensing system for dispensing material onto a substrate. In one embodiment, the material is dispensed into a cavity of the substrate, the cavity having an unknown volume. The dispensing system includes a housing, a dispensing apparatus, coupled to the housing, that dispenses a metered quantity of material, and a volumetric measuring probe, coupled to the housing, and positionable over the cavity of the substrate to measure the volume of the cavity. In embodiments, the volumetric measuring probe includes a concave section having a mating edge that is constructed and arranged to create a substantially airtight seal between the probe and the substrate, a chamber, a first valve, disposed between the chamber and the concave section, a pressure transducer coupled to the concave section to determine air pressure within the concave section, an air inlet port, a second valve, disposed between the air inlet port and the concave section, an air exhaust port, and a third valve, disposed between the chamber and the exhaust port. In one embodiment, the volumetric measuring probe determines the volume of material dispensed from the dispensing system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.