Surface acoustic wave device
US5920143A · kind A · utility
15Cited by
9References
46Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 15, 1997 |
| Grant date | Jul 6, 1999 |
| Priority date | — |
| Expiry date | Jul 15, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02582
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A surface acoustic wave device is disclosed which includes a piezoelectric substrate upon which a surface wave propagation film, which is comprised of a diamond-like carbon or aluminum nitride film, is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.