Patent · US Expired

Microelectromechanical television scanning device and method for making the same

US5920417A · kind A · utility

121Cited by
12References
9Claims
0Family size

Assignee

Inventor

Key dates

Filing dateApr 24, 1996
Grant dateJul 6, 1999
Priority date
Expiry dateApr 24, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/101
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A single reflector, two-axis MEMS scanner made of a substrate. The substrate has nested, cut-out regions. Each region is independently rotatable about one of the axes. The axes of the regions are substantially orthogonal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.