Microelectromechanical television scanning device and method for making the same
US5920417A · kind A · utility
121Cited by
12References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 24, 1996 |
| Grant date | Jul 6, 1999 |
| Priority date | — |
| Expiry date | Apr 24, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A single reflector, two-axis MEMS scanner made of a substrate. The substrate has nested, cut-out regions. Each region is independently rotatable about one of the axes. The axes of the regions are substantially orthogonal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.