Patent · US Expired

Method for protecting extraction electrode during processing of Spindt-tip field emitters

US5921838A · kind A · utility

5Cited by

2References

4Claims

0Family size

Assignee

Motorola, Inc. · US

Inventors

Sung P. Pack · Tempe, US
Patricia A. Norton · Mesa, US
Robert F. Woodburn, Jr. · Mesa, US

Key dates

Filing date	Dec 27, 1996
Grant date	Jul 13, 1999
Priority date	—
Expiry date	Dec 27, 2016

Classification

Technology area (CPC H)Electricity
CPC primaryH01J9/025
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for protecting extraction electrodes (140) during processing of Spindt-tip field emitters (150, 155) includes the steps of: (i) depositing a parting layer (170) on the extraction electrodes (140) and in an interspace region (145) defined by the extraction electrodes (140), (ii) sharpening the Spindt-tip field emitters (150), (iii) depositing a layer (180) of emission-enhancing material on the sharpened field emitters (155) and on the parting layer (170), and (iv) removing the parting layer (170), thereby lifting off the emission-enhancing material from the extraction electrodes (140) and from the interspace region (145), but not from the sharpened field emitters (155).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.