System and method for optical inspection of recessed surfaces
US5923419A · kind A · utility
12Cited by
15References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 16, 1997 |
| Grant date | Jul 13, 1999 |
| Priority date | — |
| Expiry date | Jun 16, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/909
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection system wherein a camera (14) images recessed surfaces of a workpiece through a lens (16). Video signals to the image are provided to a computer (30) that compares selected parameters of the image with predetermined values. Based on that comparison, computer (30) selectively signals a controller (20) to activate a rejector assembly (24). Lens (16) is a microlens of the wide angle type to provide an open image of the recessed surface to camera (14). An illumination system (54) directs diffused light through a gap (52) between the lens (16) and the workpiece (10) to illuminate the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.