Optomechanical microdevice for use in optomechanical microdeflector applications
US5923480A · kind A · utility
31Cited by
5References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 2, 1997 |
| Grant date | Jul 13, 1999 |
| Priority date | — |
| Expiry date | Apr 2, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0875
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention concerns an optomechanical microdevice comprising: PA1 a stationary section (2) defining a plane (x, y) of the microdevice, PA1 at least one primary lens (4) capable of moving in the plane of the microdevice and of deflecting a beam of light in the same plane, PA1 at least one fastening arm (6) joining the primary lens to the stationary section, one part of the arm being capable of moving and of moving the movable lens in the plane of the microdevice.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.