Processes for the scrubbing of noxious substances
US5925167A · kind A · utility
5Cited by
7References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 14, 1997 |
| Grant date | Jul 20, 1999 |
| Priority date | — |
| Expiry date | Jul 14, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/909
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for the scrubbing of noxious substances from an exhaust gas stream from an evacuated process chamber containing a tool for the processing of semiconductor devices. The method comprises directing the stream from the chamber in to a duct containing a multi-way valve and selectively adjusting the valve to cause different fractions of the stream to be directed to relevant treatment/collection/exhaust points.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.