Alpha-particle gas-pressure sensor
US5925823A · kind A · utility
0Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 1997 |
| Grant date | Jul 20, 1999 |
| Priority date | — |
| Expiry date | May 30, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Gas pressure in a chamber is determined by injecting alpha particles. The alpha particles ionize the gas. By determining a number of gas ions which are ionized, the pressure of the gas in the chamber can be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.