Light valve target comprising electrostatically-repelled micro-mirrors
US5926309A · kind A · utility
95Cited by
17References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 29, 1998 |
| Grant date | Jul 20, 1999 |
| Priority date | — |
| Expiry date | Apr 29, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N9/3141
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A high intensity light modulator includes a micro-mirror light valve target with electrostatically-repelled micro-mirror elements. Each micro-mirror of the target array comprises a base electrode and an overlying micro-mirror element. In operation, charge is deposited upon the micro-mirrors to produce repulsive electrostatic forces that outwardly deflect the micro-mirror elements by an amount proportional to the deposited charge. In one embodiment, an array of micro-mirror light valves is formed directly upon the face plate of a vidicon tube and is addressed using a scanning electron gun.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.