Optomechanical acceleration sensor
US5926591A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 1997 |
| Grant date | Jul 20, 1999 |
| Priority date | — |
| Expiry date | Apr 22, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4202
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optomechanical sensor for measuring or detecting an acceleration or a vibration in at least one direction. The sensor has a frame, and a flexible beam having two ends. A first end is attached to the frame and a second end is mobile in the at least one direction, in response to an acceleration movement of the frame. The flexible beam includes an optical guiding structure having an input and an output. The frame has N light collection elements, where N is an integer .gtoreq.2. The frame also includes a multi-mode coupler having an input facing the output of the optical guiding structure and N outputs, the coupler coupling an optical signal at the output of the optical guiding structure to the N light collection elements. The multi-mode coupler may also transform an input light beam having a maximum into a distribution having N maxima at the output of the coupler.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.