Selection device for providing one or the other of two gases to an apparatus
US5928415A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1996 |
| Grant date | Jul 27, 1999 |
| Priority date | — |
| Expiry date | Nov 19, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A selection device for delivering one of two gases to an apparatus includes an apparatus having an inlet and an outlet, and a gas delivery line connected to the inlet of the apparatus. A first feed line and a second feed line for respectively feeding a first and a second gas are provided. A first purge line and a second purge line are also provided, the first feed line being connected to the first purge line and the second feed line being connected to the second purge line. A common connection line connects the first and the second feed lines to the gas delivery line. An additional purge line is connected to the outlet of the apparatus. A first element, a second element, and a third element for creating a pressure drop are disposed in the first, the second, and the additional purge lines, respectively, the first element for creating a pressure drop and the third element for creating a pressure drop being flow-regulating elements, the second element for creating a pressure drop being a backpressure regulator. The common gas delivery line is only connected to the common connection line and to the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.