Method and apparatus for gas phase coating complex internal surfaces of hollow articles
US5928725A · kind A · utility
31Cited by
20References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 18, 1997 |
| Grant date | Jul 27, 1999 |
| Priority date | — |
| Expiry date | Jul 18, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/045
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus is provided to coat the internal surfaces of a hollow article having gas flow passages by supplying a coating gas to the passages with the coating gas flow rate to at least two of the passages controlled to a different rate to deposit a coating of desired thickness on the internal surfaces of each passage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.