Electromagnetic radiation detector
US5929440A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 25, 1996 |
| Grant date | Jul 27, 1999 |
| Priority date | — |
| Expiry date | Oct 25, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0866
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electromagnetic radiation (EMR) responsive detector includes an array of multi-layered cantilevers with each cantilever having at least a first layer for absorbing EMR signals and a second layer for reflecting light incident on the second layer. Each cantilever is formed so it can absorb EMR which gets converted into heat which then causes the cantilever to bend proportionately to the amount of EMR energy it absorbs. The amount of EMR absorbed by each cantilever of the array is optically read-out (sensed) by illuminating the cantilevers of the array and sensing the light reflected from each cantilever. Various schemes for projecting light onto the array and sensing the reflected light are disclosed. The optical read-out of the array eliminates the need for electronic read-out circuitry and accessing wires to be formed on the array. The simplicity of the structure of the array elements and eliminating the need for read-out wiring and electronics permits the fabrication of a detector array with extremely high packing density.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.