Micromechanical stepper motor
US5929542A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 3, 1997 |
| Grant date | Jul 27, 1999 |
| Priority date | — |
| Expiry date | Feb 3, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S310/06
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micromachined stepper motor having a toothed slider connected at either end to spring flexures. At least one of the spring flexures is positioned between a load, such as a high pass optical filter, and the slider. The slider is positioned within three stators that are sequentially energized such that they move the slider along its longitudinal axis. The springs and guide posts hold the slider in place and establish a rest position when no driving force is applied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.