Method for fabricating with ultrasonic vibration a carbon coating
US5932302A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 1997 |
| Grant date | Aug 3, 1999 |
| Priority date | — |
| Expiry date | Aug 13, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/21
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
In a process for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions and the coating contains pin-holes having a density of 30/mm.sup.2 or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.