Instrument for magnetic measurement of oxygen
US5932794A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 1998 |
| Grant date | Aug 3, 1999 |
| Priority date | — |
| Expiry date | May 18, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/74
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a micro-mechanical device for determining the oxygen content in a gas mixture or gas matrix including a dumbbell-shaped element having a base plate and two volumes of the gas to be measured arranged on opposing sides of a center portion of the base plate. The center portion of the base plate is held by a clamping band which is torsionally held such that the base plate rotates about the center portion. A mirror element on the base plate is used to determine a rotational position of the base plate and a compensation coil for conducting current and creating a rotational force to counter any rotation by the base plate is arranged on the dumbell-shaped element. The dumbbell-shaped gas volumes, mirror and compensation coils are integrated as a coherent structural unit on a base plate in silicon micro-mechanical design, or the dumbbell-shaped gas volumes comprise a photo-active glass base plate and two cover plates bonded thereto and be embodied, together with the mirror and compensation coils, as a coherent structural unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.