Vibrating structure gyroscope
US5932804A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 1998 |
| Grant date | Aug 3, 1999 |
| Priority date | — |
| Expiry date | Feb 10, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5677
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vibrating structure gyroscope has a vibratory resonator having a substantially ring or hoop-like shape structure, an electromagnetic drive for causing the resonator to vibrate, a support structure including a plurality of flexible support beams for supporting the resonator whilst allowing it to vibrate and an electromagnetic sensor for sensing movement of the resonator. The support beams and resonator are made from silicon and the electromagnetic drive and sensor include metal tracks which extend externally along each support beam onto and along respective segments of an outer substantially planar surface of the ring-like resonator. The resonator is substantially planar and means is produced a magnetic field substantially perpendicular to the plane of the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.