Patent · US Expired

Scintillator device and image pickup apparatus using the same

US5932880A · kind A · utility

9Cited by
3References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 5, 1997
Grant dateAug 3, 1999
Priority date
Expiry dateMay 5, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2443
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A scintillator device and an image pickup apparatus using the scintillator, in which the scintillator for converting an input particle or electron beam image into an optical image is applied with a voltage between electrodes formed at the input plane of the electron beam and the output plane of scintillation. This voltage generates an electric field in the scintillator so that scattering of a charged particle beam in the scintillator is prevented and the resolution and S/N ratio can be improved while retaining a large amount of scintillation. Accordingly, the shift amount of low energy charged particle beams from the incident axis, which greatly influences degradation of the resolution and S/N ratio, can be suppressed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.