Optical interferometer with multiple heads
US5933234A · kind A · utility
Inventor
Key dates
| Filing date | Aug 11, 1998 |
| Grant date | Aug 3, 1999 |
| Priority date | — |
| Expiry date | Aug 11, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/0205
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multiple optical head interferometer comprises one Light Source-Detection-Computing unit and multiple optical heads. The diameters of all of the optical heads are of equal size, and oriented in the same direction. Shutters or adjustable mirrors are provided such that the Light Source-Detection-Computing unit is used with only one optical head at a time. The multiple optical head interferometer of the present invention may measure many workpieces quickly in a short time, as while one workpiece is being measured, others may be setup for measurement or removed for further processing. In a first embodiment, the branching device for branching the laser beam comprises a plurality of beam splitters. Shutters are used to control which optical head is to be used with the Light Source-Detection-Computing unit at a particular time. In the second and preferred embodiment of the present invention, branching out of the optical heads is achieved by using adjustable mirrors and reflection. Branching out by means of reflection has the advantage of conserving light energy and has less unwanted optical noise. The position of the adjustable mirror is determined to control which optical head is to be…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.