Method for surface treatment of a cadmium zinc telluride crystal
US5933706A · kind A · utility
13Cited by
12References
10Claims
0Family size
Inventors
Key dates
| Filing date | May 28, 1997 |
| Grant date | Aug 3, 1999 |
| Priority date | — |
| Expiry date | May 28, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/465
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for treatment of the surface of a CdZnTe (CZT) crystal that reduces surface roughness (increases surface planarity) and provides an oxide coating to reduce surface leakage currents and thereby, improve resolution. A two step process is disclosed, etching the surface of a CZT crystal with a solution of lactic acid and bromine in ethylene glycol, following the conventional bromine/methanol etch treatment, and after attachment of electrical contacts, oxidizing the CZT crystal surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.