Combined topography and electromagnetic field scanning probe microscope
US5936237A · kind A · utility
Inventor
Key dates
| Filing date | Apr 30, 1997 |
| Grant date | Aug 10, 1999 |
| Priority date | — |
| Expiry date | Apr 30, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/875
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A combined near-zone electromagnetic field and topography probe based on a scanning-probe microscope (SPM). One or a plurality of sub-wavelength electromagnetic antennas and waveguides are integrated with tip-cantilever assemblies commonly used in scanning probe microscopy, combining the contact- or non-contact-mode tip-sample distance control and topography-sensing capacity of the SPM with the ability to measure or excite local electromagnetic fields on the sample. A wide range of topography-sensing forces acting on the tip-cantilever assembly can be employed, such as capillary, van der Waals, electrostatic and magnetic. Simultaneous measurement and/or excitation of electromagnetic fields in the frequency range from near zero to tens of THz can be performed, limited only by the design and ability of the antenna and waveguide material(s) to localize and guide the electromagnetic energy, and by suitable means for energy detection and/or generation connected to the waveguide. In one embodiment, the topography probe tip also acts as the center conductor of a tapered coaxial tip which is connected to a shielded transmission line waveguide running the length of the cantilever to a coaxi…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.