Electron microscope and electron microscopy method
US5936244A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 1997 |
| Grant date | Aug 10, 1999 |
| Priority date | — |
| Expiry date | Dec 18, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2455
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope for observing a magnetization state of a specimen with high resolution and an electron microscopic method. The electron microscope comprises an electron beam irradiating device including a scanning coil 3 and an objective lens 4 to irradiate an electron beam 2 emitted from an electron source 1 on a desired part of a specimen 51, and a circularly polarized light detector including a quarter wave plate 8, a polarizer 9 and a photodetector 11 to detect circularly polarized light generated from the electron beam irradiated part of the specimen 51. Since the intensity of the circularly polarized light generated from the specimen irradiated with the electron beam depends on the direction of magnetization in the electron beam irradiated part and the detecting direction, the distribution of magnetization can be measured by observing a scanning image in the form of a luminance signal indicative of the intensity of the circularly polarized light while scanning the electron beam irradiated part on the surface of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.