Method and device for delivering a pure gas charged with a predetermined quantity of at least one gaseous impurity to an apparatus
US5937886A · kind A · utility
8Cited by
10References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1996 |
| Grant date | Aug 17, 1999 |
| Priority date | — |
| Expiry date | Nov 19, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87788
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of delivering a pure gas charged with a predetermined quantity of at least one gaseous impurity to an apparatus, comprising the steps of mixing at least two different auxiliary gases, including the impurity to form a mixture, diluting a sampled quantity of the mixture in the pure gas in a predetermined manner, delivering the pure gas charged with the impurity to the apparatus, wherein the auxiliary gases are stored in a reservoir in the form of a mixture of known composition, most of the auxiliary gases in the mixture having volume concentrations substantially of the same order of magnitude.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.