Functional product
US5938898A · kind A · utility
35Cited by
5References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 1995 |
| Grant date | Aug 17, 1999 |
| Priority date | — |
| Expiry date | Apr 20, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2217/78
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A functional product comprising at least one layer of a thin film having a function formed above a substrate; and at least one layer of an oxide film whose major component is an oxide containing tin and silicon, formed above the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.