Microfabricated filter and capsule using a substrate sandwich
US5938923A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 15, 1997 |
| Grant date | Aug 17, 1999 |
| Priority date | — |
| Expiry date | Apr 15, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2325/04
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A microfabricated filter made up of two bonded substrate structures, each consisting of single crystalline silicon can optionally be formed into a capsule. The pores of the filter consist of one or more channels disposed between the two substrate structures. The width of the channels are defined by a thickness of a sacrificial layer formed on one of the substrate structures. The filter includes pores having a precisely controlled pore width which may be as small as 5 nanometers. The filter provides a relatively high mechanical strength relative to filters having polycrystalline silicon structures and also has a high throughput and can be modified to have high resistance to adsorption of particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.