Low-vacuum mass spectrometer
US5939613A · kind A · utility
10Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 1998 |
| Grant date | Aug 17, 1999 |
| Priority date | — |
| Expiry date | Jul 29, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2444
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides a low-vacuum mass specrometer for use as gas analyzer, including a drift tube having a gas inlet and an ionization region at one end thereof, a power source for supplying the required high tension, a vacuum pump connectable to the drift tube to maintain a level of vacuum of up to 1 Torr, and a detector located at the other end of the drift tube, wherein the detector is a multisphere plate comprised of a multilayer arrangement of beads bonded together in a substantially close-packing order.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.