Radiation beam position sensor
US5939704A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 1996 |
| Grant date | Aug 17, 1999 |
| Priority date | — |
| Expiry date | Nov 13, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J1/4257
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for detecting the position of a primary beam of electromagnetic radiation, the apparatus including a leaky mirror for reflecting the primary beam and for extracting from the primary beam a secondary beam and a position sensitive detector for detecting the spatial position of the secondary beam, wherein the leaky mirror comprises a material which has a transmissivity of less than 0.2 for the radiation of the primary beam and the position sensitive detector is arranged in the path of the secondary beam after transmission by the leaky mirror, the position of the secondary beam providing a measure of the position of the primary beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.