Growth of electroluminescent phosphors by MOCVD
US5942284A · kind A · utility
19Cited by
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3Claims
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Key dates
| Filing date | Nov 27, 1996 |
| Grant date | Aug 24, 1999 |
| Priority date | — |
| Expiry date | Nov 27, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09K11/562
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A method for depositing a thin film including a sulfide of a metal on a substrate. First and second vapor streams are generated and combined in the vicinity of the substrate. The first vapor stream includes an organic compound containing the metal is generated. The second vapor stream includes a mercaptan. The preferred mercaptan is tertrary-butyl-mercaptan. The preferred metal precursor is a .beta.-diketonate of the metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.