Micromachined devices having microbridge structure
US5942791A · kind A · utility
42Cited by
14References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 1997 |
| Grant date | Aug 24, 1999 |
| Priority date | — |
| Expiry date | Mar 4, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N15/10
Abstract
A method of fabricating a microbridge structure for a thermal detector array comprises growing a planarising layer on a substrate, growing a ferroelectric material layer on the planarising layer and then etching the planarising layer away, either wholly or partially, to leave a ferroelectric microbridge having a uniform thickness. The planarising layer may be a sacrificial layer or may comprise a sacrificial layer as well as other layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.