Spatial light modulator having improved contrast ratio
US5943157A · kind A · utility
47Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 6, 1998 |
| Grant date | Aug 24, 1999 |
| Priority date | — |
| Expiry date | May 6, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator (70) comprised of an array of micromirrors (72) each having support post (74). The support post (74) defines support post edges (76) in the upper surface of the mirrors (72). These support post edges (76) are all oriented at 45 degree angles with respect to an incident beam of light from a light source (80) to minimize diffraction of light from the edges (76) into the darkfield optics when the mirrors are oriented in the off-state. The present invention achieves an increased contrast ratio of about 20% over conventional designs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.