Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method
US5943158A · kind A · utility
228Cited by
2References
13Claims
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Key dates
| Filing date | May 5, 1998 |
| Grant date | Aug 24, 1999 |
| Priority date | — |
| Expiry date | May 5, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-mechanical, anti-reflective, switched optical modular array that utilizes a continuous, uninterrupted modular membrane across an array of individual modulators. The individual modulators are positioned within an optical window of the device, the optical window being defined by a region of the membrane situated between an array of electrode pairs, where an individual pair of electrodes is used to control an individual one of the modulators. Alternative electrode shapes and fabrication methods are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.