300 mm microenvironment pod with door on side
US5944194A · kind A · utility
17Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 10, 1997 |
| Grant date | Aug 31, 1999 |
| Priority date | — |
| Expiry date | Sep 10, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67763
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.