Patent · US Expired

Dual target cathode assembly with shielding

US5944967A · kind A · utility

35Cited by

1References

3Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Hans Kunz · Hasselroth, DE
Andreas Sauer · Großostheim, DE
Manfred Schuhmacher · Alzenau, DE
Joachim Szczyrbowski · Goldbach, DE
Dietmar Marquardt · Niederrodenbach, DE

Key dates

Filing date	Nov 7, 1995
Grant date	Aug 31, 1999
Priority date	—
Expiry date	Nov 7, 2015

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3408
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A dual magnetron cathode assembly includes a pair of elongate, parallel targets in coplanar relationship fixed to respective magnetic yokes with associated rows of permanent magnets for producing a magnetic field over the targets. A common back plate is provided for both cathodes, a center shield plate extending from the back plate to between the targets, side shield plates and end shield plates likewise extending from the back plate to form side-by-side rectangular shielding enclosures which expose only the sputtering surface of the targets. The yokes are fixed with respect to the vacuum chamber by insulative holders which extend through openings in the back plate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.