Microfabricated particle thin film filter and method of making it
US5948255A · kind A · utility
51Cited by
28References
39Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1997 |
| Grant date | Sep 7, 1999 |
| Priority date | — |
| Expiry date | May 2, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2325/38
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A thin film filter fabricated using surface micromachining. The width of the filter pores is determined by the thickness of a sacrificial thin-film layer. This dimension can be precisely controlled, and may be as small as about 50 angstroms. The pore length may also be determined by the thickness of thin film layers and can therefore be smaller than the limit of resolution obtainable with photolithography. The filters are suitable for use at high temperatures and with many harsh solvents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.