Uncooled thin film pyroelectric IR detector with aerogel thermal isolation
US5949071A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 1997 |
| Grant date | Sep 7, 1999 |
| Priority date | — |
| Expiry date | Aug 14, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N15/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.