Mars optical modulators
US5949571A · kind A · utility
88Cited by
5References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 1998 |
| Grant date | Sep 7, 1999 |
| Priority date | — |
| Expiry date | Jul 30, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/02
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The specification describes a double poly Mechanical Anti-Reflection Switch (MARS) device in which shorting between the lower poly metallization and the silicon substrate is prevented by providing an insulating layer on the surface of the silicon substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.