Patent · US Expired

Inductor devices using substrate biasing technique

US5952704A · kind A · utility

54Cited by
6References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 17, 1997
Grant dateSep 14, 1999
Priority date
Expiry dateApr 17, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01F2017/0046
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Inductors used for impedance matching in the radio frequency integrated circuits is disclosed. In the integrated inductor device according to the present invention, an additional electrode is arranged in surroundings of an inductor metal line, and the reverse bias voltage is applied to the region between the substrate and the electrode so as to form a depletion layer. Therefore, the substrate biasing is effected and thus an inductor having improved performance can be formed by decreasing the parasitic capacitance between the inductor metal line and the substrate. The present invention can also be applied to another semiconductor device having metal lines and pads.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.