Asymmetrical thermal actuation in a microactuator
US5954079A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1996 |
| Grant date | Sep 21, 1999 |
| Priority date | — |
| Expiry date | Apr 30, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0391
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microminiature valve having an actuator member that includes a central body suspended on radially spaced legs, with each leg having first and second layers of materials having substantially different coefficients of thermal expansion. The legs include heating elements and are fixed at one end to allow radial compliance as selected heating of the legs causes flexure. An actuator member includes a boss having an actuator face. A seat substrate having a flow via defined by a valve seat is aligned with the actuator face. Asymmetrical thermal actuation of the actuator member moves the actuator face from the valve seat in a rotational displacement relative to the flow orifice, thereby offering improved control of the fluid flow through the orifice.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.