Wafer conveyor system
US5955857A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 1996 |
| Grant date | Sep 21, 1999 |
| Priority date | — |
| Expiry date | Aug 14, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer conveyor system and controlling method therefor sends/receives a semiconductor wafer to/from a designated place includes a stocker for storing and delivering a package box with a plurality of wafers therein, a transferring path for connecting one stocker with another stocker, a carrier traveling along the transferring path for transporting the package box between the stockers, an automatic charging device placed to any one position of the transferring path for charging a battery loaded onto the carrier traveling along the transferring path when the battery is discharged, and a central control unit for controlling the driving of the stocker, transferring path, carrier and automatic charging device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.